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dc.contributor.authorRahman, Dr. Md. Mosaddequr
dc.contributor.authorHernandez, Jonathan A Reynoso
dc.contributor.authorChowdhury, Sazzadur Tanvir Ur Rahman
dc.date.accessioned2016-11-30T08:59:17Z
dc.date.available2016-11-30T08:59:17Z
dc.date.issued2013
dc.identifier.citationRahman, M., Hernandez, J., & Chowdhury, S. (2013). An improved analytical method to design CMUTs with square diaphragms. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 60(4), 834-845. doi:10.1109/TUFFC.2013.2632en_US
dc.identifier.issn08853010
dc.identifier.urihttp://hdl.handle.net/10361/7045
dc.descriptionThis article was published in the IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control [© 1986-2012 IEEE.] and the definite version is available at: http://doi.org/10.1109/TUFFC.2013.2632 The Article's website is at: http://ieeexplore.ieee.org/document/6489818/en_US
dc.description.abstractA highly accurate mathematical method has been presented for analytical characterization of capacitive micromachined ultrasonic transducers (CMUTs) built with square diaphragms. The method uses a new two-dimensional polynomial function to more accurately predict the deflection curve of a multilayer square diaphragm subject to both mechanical and electrostatic pressure and a new capacitance model that takes into account the contribution of the fringing field capacitances. Both of the models have been experimentally verified by comparing the models predicted values with measurement results and are found to be in excellent agreement with a maximum deviation of less than 2% for experimentally measured capacitance values. 3-D electromechanical finite element analysis (FEA) for a wide range of material properties, geometric specifications, and loading conditions show that the presented method is highly consistent in accuracy over the typical square-diaphragm CMUT design space.en_US
dc.language.isoenen_US
dc.publisher© 1986-2012 Institute of Electrical and Electronics Engineers Inc.en_US
dc.relation.urihttp://ieeexplore.ieee.org/document/6489818/
dc.titleAn improved analytical method to design CMUTs with square diaphragmsen_US
dc.typeArticleen_US
dc.description.versionPublished
dc.contributor.departmentDepartment of Electrical and Electronic Engineering
dc.identifier.doi10.1109/TUFFC.2013.2632


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