• Login
    • Library Home
    View Item 
    •   BracU IR
    • BracU Faculty Publications
    • Dr. Md. Mosaddequr Rahman
    • Article
    • View Item
    •   BracU IR
    • BracU Faculty Publications
    • Dr. Md. Mosaddequr Rahman
    • Article
    • View Item
    JavaScript is disabled for your browser. Some features of this site may not work without it.

    Square diaphragm CMUT capacitance calculation using a new deflection shape function

    Thumbnail
    Date
    2011
    Publisher
    © 2011 Hindawi Publishing Corporation
    Author
    Rahman, Md. Mosaddequr
    Chowdhury, Sazzadur Tanvir Ur Rahman
    Metadata
    Show full item record
    URI
    http://hdl.handle.net/10361/7237
    Citation
    Rahman, M. M., & Chowdhury, S. (2011). Square diaphragm CMUT capacitance calculation using a new deflection shape function. Journal of Sensors, 2011 doi:10.1155/2011/581910
    Abstract
    A new highly accurate closed-form capacitance calculation model has been developed to calculate the capacitance of capacitive micromachined ultrasonic transducers (CMUTs) built with square diaphragms. The model has been developed by using a two-dimensional polynomial function that more accurately predicts the deflection curve of a square diaphragm deformed under the influence of a uniform external pressure and also takes account of the fringing field capacitances. The model has been verified by comparing the model-predicted deflection profiles and capacitance values with experimental results published elsewhere and finite element analysis (FEA) carried out by the authors for different material properties, geometric specifications, and loading conditions. New model-calculated capacitance values are found to be in excellent agreement with published experimental results with a maximum deviation of 1.7, and a maximum deviation of 1.5 has been observed when compared with FEA results. The model can help in improving the accuracy of the design methodology of CMUT devices and other MEMS-based capacitive type sensors built with square diaphragms.
    Keywords
    Description
    This article was published in the Journal of Sensors [© 2011 Md Mosaddequr Rahman and Sazzadur Chowdhury.] and the definite version is available at: http://doi.org/10.1155/2011/581910 The Article's website is at: https://www.hindawi.com/journals/js/2011/581910/
    Publisher Link
    https://www.hindawi.com/journals/js/2011/581910/
    DOI
    http://doi.org/10.1155/2011/581910
    Department
    Department of Electrical and Electronic Engineering, BRAC University
    Collections
    • Article

    Copyright © 2008-2019 Ayesha Abed Library, Brac University 
    Contact Us | Send Feedback
     

     

    Policy Guidelines

    • BracU Policy
    • Publisher Policy

    Browse

    All of BracU Institutional RepositoryCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsThis CollectionBy Issue DateAuthorsTitlesSubjects

    My Account

    LoginRegister

    Statistics

    View Usage Statistics

    Copyright © 2008-2019 Ayesha Abed Library, Brac University 
    Contact Us | Send Feedback